Diagnostics of a high-pressure DC magnetron argon discharge with an aluminium cathode
Justus-Liebig-University, Giessen, Germany
2 Department of Physics and Engineering Physics, University of Saskatchewan, S7N 5E2, Saskatoon, SK, Canada
3 CNRS, PIIM, Aix-Marseille Université, 13397, Marseille, France
Accepted: 3 August 2021
Published online: 9 September 2021
In this article, the plasma parameters of a direct current magnetron discharge in argon at moderate pressure (10 to 40 Pa) using an aluminium cathode are explored. The density of argon excited states, the sputtered aluminium atom density and the electron temperature are estimated using a collisional–radiative model. The electron temperature obtained using optical emission spectroscopic data agrees well with measurements taken using a Langmuir probe. The influence of the discharge parameters, namely the background argon pressure and the discharge current, are discussed.
© The Author(s), under exclusive licence to EDP Sciences, SIF and Springer-Verlag GmbH Germany, part of Springer Nature 2021