https://doi.org/10.1140/epjd/s10053-021-00291-5
Regular Article – Optical Phenomena and Photonics
Effects of static and dynamic femtosecond laser modifications of Ti/Zr multilayer thin films
1
Department of Atomic Physics, “VINČA” Institute of Nuclear Sciences - National Institute of the Republic of Serbia, University of Belgrade, P.O.Box 522, 11001, Belgrade, Serbia
2
Institute of Electronic Structure and Laser (IESL), Foundation for Research and Technology (FORTH), N. Plastira 100, Vassilika Vouton, 70013, Heraklion, Crete, Greece
3
Institute of Physics, University of Belgrade, Pregrevica 118, 11080, Belgrade, Serbia
Received:
30
March
2021
Accepted:
13
October
2021
Published online:
7
December
2021
The experimental study of the static and dynamic femtosecond laser ablation of the multilayer 15x(Ti/Zr)/Si system is reported. The layer-by-layer selective laser ablation mechanism was studied by analysis of the surface morphology and elemental composition in static single pulse irradiation in a range of pulse energy from 10 to 17 
J. The selective ablations, as number of concentric circles in modified spots are increased with the pulse energy. The boundary between the circles was shown a change in the depth, comparable to the thickness of the individual layers. Changes in the elemental composition at the edges are associated with the removal of the layer by layer. The dynamic multipulse irradiation was observed via the production of lines with laser-induced periodic surface structures (LIPSS) at different laser parameters (scan velocities and laser polarization). The spatial periodicity of the formed LIPSS depends on changes in the effective number of pulses and laser polarization, as well as the nature of the material. For better interpretation of the experimental results, simulations have been conducted to explore the thermal response of the multiple layered structure 15x(Ti/Zr) after static single pulse irradiation.
© The Author(s) 2021
Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.
