https://doi.org/10.1140/epjd/e2005-00153-2
Morphological studies of nanostructures from directed cluster beam deposition
1
Physics Department, Kunming University of Science and Technology, Kunming,
Yunnan 650093, P.R. China
2
Materials Research Center and Department of Physics, University of Freiburg, 79104 Freiburg, Germany
3
National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, P.R. China
Corresponding author: a sjhanmin@nju.edu.cn
Received:
6
September
2004
Published online:
13
July
2005
Tin clusters with a most probable size of 2.2 nm are formed from a magnetron plasma aggregation cluster source and deposited on the amorphous carbon and silicon surface. The morphologies of the cluster-based nanostructures formed by directed cluster beam deposition with different cluster energies and incident angles are analyzed based on the transmission electron microscope (TEM) and atomic force microscope (AFM) observation.
PACS: 36.40.Sx – Diffusion and dynamics of clusters / 61.46.+w – Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals / 81.07.-b – Nanoscale materials and structures: fabrication and characterization
© EDP Sciences, Società Italiana di Fisica, Springer-Verlag, 2005
