https://doi.org/10.1140/epjd/s10053-025-00979-y
Regular Article - Atomic and Molecular Collisions
Generalized oscillator strengths and integral cross sections for the valence shell excitations of trichlorofluoromethane studied by fast electron impact
Department of Modern Physics, University of Science and Technology of China, 230026, Hefei, Anhui, China
a
jfchen04@ustc.edu.cn
b
lfzhu@ustc.edu.cn
Received:
18
January
2025
Accepted:
7
March
2025
Published online:
7
April
2025
Oscillator strengths and cross sections of the valence-shell excitations in trichlorofluoromethane CFCl
are of great importance in plasma etching and monitoring the greenhouse effect. In this work, the valence-shell excitations of CFCl have been studied by an angle-resolved electron energy loss spectrometer operated at a collision energy of 1.5 keV with an energy resolution of about 80 meV. Generalized oscillator strengths of the electronically excited states have been determined at an absolute scale by applying the crossed-beam based on the relative flow technique. The behaviors of generalized oscillator strengths of the valence shell excitations of CFCl have been analyzed. By extrapolating the generalized oscillator strengths to the zero limit of squared momentum transfer, the optical oscillator strengths have been obtained. The BE-scaled integral cross sections of the valence-shell excitations of CFCl have been derived from the excitation thresholds to 5000 eV with the help of BE-scaling method. The present oscillator strengths and cross sections supplement the fundamental database of CFCl.
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© The Author(s), under exclusive licence to EDP Sciences, SIF and Springer-Verlag GmbH Germany, part of Springer Nature 2025
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
