Regular Article – Plasma Physics
Absolute densities of O and O in the effluent of an atmospheric pressure plasma jet (kINPen) operated with He and Ar determined by molecular beam mass spectrometry
Institute of Experimental and Applied Physics, Kiel University, Leibnizstrasse 11-19, 24098, Kiel, Germany
Accepted: 27 February 2023
Published online: 27 March 2023
The absolute densities of O and O in the effluent of a kINPen, an atmospheric pressure plasma jet, are determined by molecular beam mass spectrometry. A nitrogen gas curtain surrounding the effluent provides a stable environment and prevents interactions with the ambient air. Both He and Ar were used as feed gas with admixtures of O up to 1%. Measurements are performed at discharge voltages from 1600 to 3000 and at distances from 5.5 to 10.5 mm from the nozzle of the gas shielding device to the orifice of the mass spectrometer. The measured O atom densities are in the order of 1 to 2 , whereas the O molecule densities are in the order of 1 to 5 , respectively, when operated in argon the plasma generates higher densities of reactive species. Additionally, a novel molecular beam chopper design with linear movement has been successfully tested in the mass spectromerty setup as an alternative to a rotating chopper.
© The Author(s) 2023
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