https://doi.org/10.1140/epjd/s10053-022-00539-8
Regular Article – Plasma Physics
Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N
and Ar + O gas mixtures
1
Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 18221, Prague, Czech Republic
2
Institut für Physik, Universität Greifswald, Felix-Hausdorff-Str. 6, 17489, Greifswald, Germany
a
hippler@physik.uni-greifswald.de
Received:
19
September
2022
Accepted:
25
October
2022
Published online:
9
November
2022
A hollow cathode discharge with a Ti cathode and a positively biased ring anode was operated in Ar + N or Ar + O gas mixtures. The energy distribution of plasma ions is investigated with the help of energy-resolved mass spectrometry. Singly and doubly charged Ar
and Ar
ions and molecular N
or O ions are the most abundant ionic species. The kinetic energy of all plasma ions is enhanced by a positive anode voltage.
© The Author(s) 2022
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