Regular Article – Plasma Physics
Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N and Ar + O gas mixtures
Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 18221, Prague, Czech Republic
2 Institut für Physik, Universität Greifswald, Felix-Hausdorff-Str. 6, 17489, Greifswald, Germany
Accepted: 25 October 2022
Published online: 9 November 2022
A hollow cathode discharge with a Ti cathode and a positively biased ring anode was operated in Ar + N or Ar + O gas mixtures. The energy distribution of plasma ions is investigated with the help of energy-resolved mass spectrometry. Singly and doubly charged Ar and Ar ions and molecular N or O ions are the most abundant ionic species. The kinetic energy of all plasma ions is enhanced by a positive anode voltage.
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