Cross sections set and transport coefficients for Ar+ in Ar/CF4 mixtures
Institute of Physics, University of Belgrade,
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Received in final form: 30 April 2018
Published online: 2 October 2018
In this letter, we present a cross section set for Ar+ in Ar/CF4 mixtures where existing experimentally obtained data are selected and extrapolated. A Monte Carlo simulation method is applied to accurately calculate transport parameters in hydrodynamic regime. We discuss new data for Ar+ ions in Ar/CF4 mixtures where mean energy, flux and bulk values of reduced mobility and other transport coefficients are given as a function of low and moderate reduced electric fields E/N (E-electric field, N-gas density).
Key words: Plasma Physics
© EDP Sciences / Società Italiana di Fisica / Springer-Verlag GmbH Germany, part of Springer Nature, 2018