Eur. Phys. J. D (2017) 71: 27
https://doi.org/10.1140/epjd/e2016-70607-5

Regular Article

Mass spectrometry of diffuse coplanar surface barrier discharge: influence of discharge frequency and oxygen content in N₂/O₂ mixture^*

¹ Masaryk University, CEPLANT – R&D Centre for Low-Cost Plasma and Nanotechnology Surface Modification, Kotlrášká 2, 611 37 Brno, Czech Republic
² Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia
³ Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11001 Belgrade, Serbia

^a e-mail: nevena@ipb.ac.rs

Received: 29 September 2016
Received in final form: 7 December 2016
Published online: 9 February 2017

Abstract

Diffuse Coplanar Surface Barrier Discharge (DCSBD) has been studied extensively for industrial applications in recent decade. So far, limited information was available on the production of ozone or nitrogen oxides important for industrial deployment of DCSBD. In this paper results of mass spectrometry of DCSBD performed at atmospheric pressure are presented. DCSBD mass spectra were studied for different oxygen contents in N₂/O₂ working gas mixture at low flow rate (estimated residence time in discharge chamber was approx. 3 s). Influence of the driving frequency (15, 30 and 50 kHz) at constant high voltage amplitude was studied as well. Ozone and NO production in DCSBD are given as typical representatives. Production of ozone decreases with the driving frequency, which could be attributed to the gas heating at higher frequencies.