Dissociative electron attachment to titanium tetrachloride and titanium tetraisopropoxide

Elías H. Bjarnason; Benedikt Ómarsson; Sarah Engmann; Frímann H. Ómarsson; Oddur Ingólfsson

doi:10.1140/epjd/e2014-50091-9

EPJ

Dissociative electron attachment to titanium tetrachloride and titanium tetraisopropoxide^*

Elías H. Bjarnason, Benedikt Ómarsson, Sarah Engmann, Frímann H. Ómarsson and Oddur Ingólfsson^a

Science Institute University of Iceland, Dunhaga 3, Reykjavik, Iceland

Received: 31 January 2014
Received in final form: 12 March 2014
Published online: 15 May 2014

Abstract

Here we present a dissociative electron attachment study of titanium tetrachloride and titanium tetraisopropoxide in the incident electron energy range from about 0–18 eV. The results are compared to electron impact ionization and fragmentation of these compounds and discussed in relation to the role of secondary electrons in focused electron beam induced deposition. We also use the opportunity and describe in detail a recently constructed crossed beam apparatus for the study of the energy dependency of ion formation in low energy electron interaction with gas phase molecules.

Contribution to the Topical Issue “Electron and Positron Induced Processes”, edited by Michael Brunger, Radu Campeanu, Masamitsu Hoshino, Oddur Ingólfsson, Paulo Limão-Vieira, Nigel Mason, Yasuyuki Nagashima and Hajime Tanuma.

23rd International Summer School on Vacuum, Electron, and Ion Technologies (VEIT)
18-22 September 2023
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EPJ

Dissociative electron attachment to titanium tetrachloride and titanium tetraisopropoxide*

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Dissociative electron attachment to titanium tetrachloride and titanium tetraisopropoxide^*