Dissociative electron attachment to titanium tetrachloride and titanium tetraisopropoxide*
Science Institute University of Iceland,
Dunhaga 3, Reykjavik, Iceland
Received: 31 January 2014
Received in final form: 12 March 2014
Published online: 15 May 2014
Here we present a dissociative electron attachment study of titanium tetrachloride and titanium tetraisopropoxide in the incident electron energy range from about 0–18 eV. The results are compared to electron impact ionization and fragmentation of these compounds and discussed in relation to the role of secondary electrons in focused electron beam induced deposition. We also use the opportunity and describe in detail a recently constructed crossed beam apparatus for the study of the energy dependency of ion formation in low energy electron interaction with gas phase molecules.
© EDP Sciences, Società Italiana di Fisica, Springer-Verlag 2014