Dust particles in collisionless plasma sheath with arbitrary electron energy distribution function
University of South Bohemia, Jeronýmova 10, 371 15 České Budějovice, Czech Republic
2 Institute for Nonthermal Physics, F.-L.-Jahn Strasse 19, 174 89 Greifswald, Germany
Corresponding author: a firstname.lastname@example.org
Published online: 9 January 2009
Dust particles often appear in industrial plasmas as undesirable product of the plasma-wall interactions. Large particles of several micrometers in diameter are concentrated in a thin layer (the sheath) above the lower electrode of the rf driven parallel plate device, where the electric force is strong enough to compensate particle's gravity. Experimental and theoretical uncertainties are significantly increased in the plasma sheath. Common models of dust charging in the plasma sheath suppose the Maxwellian electron energy distribution function (EEDF) in conjunction with a flux of cold ions satisfying classical Bohm criterion at the sheath edge. In this paper we generalize this model to arbitrary EEDF with adapted Bohm criterion. We limit our considerations to collisionless or slightly collisional plasma, where the EEDF inside the sheath is expressed through the EEDF in the plasma bulk. Derived theoretical formulas are incorporated into numerical model, describing collisionless radio frequency (rf) plasma sheath together with the electrical charge, various kinds of forces, balancing radius and oscillation frequency of particles.
PACS: 52.40.Kh – Plasma sheaths / 52.27.Lw – Dusty or complex plasmas; plasma crystals
© EDP Sciences, Società Italiana di Fisica, Springer-Verlag, 2009