Influence of the surface conditions on rf plasma characteristics
Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia
Corresponding author: a email@example.com
Revised: 5 December 2008
Published online: 16 January 2009
The secondary electron emission is a surface dependent phenomenon, more influenced by surface preparation than by the material itself. The present paper deals with the effect of the electrode surface conditions: clean (atomically clean) and contaminated electrodes (standard conditions even after mechanical and chemicals cleaning) on the characteristics of an asymmetric discharge by PIC/MCC simulations. In the arrangement with one clean and one contaminated electrode the discharge characteristics strongly depend upon which electrode is powered. The obtained PIC/MCC simulation results indicate that contamination of electrodes and variations of the secondary electron emission coefficients can lead to more or less significant changes in properties of rf plasmas.
PACS: 79.20.Rf – Atomic, molecular, and ion beam impact and interactions with surfaces / 79.20.Ap – Theory of impact phenomena; numerical simulation
© EDP Sciences, Società Italiana di Fisica, Springer-Verlag, 2009