Electron impact ionization of SiCl2 and SiCl
Department of Physics and Engineering Physics, Stevens Institute of Technology, Hoboken, NJ, 07030, USA
Corresponding author: a firstname.lastname@example.org
Revised: 1 October 2007
Published online: 5 December 2007
We measured absolute partial cross sections for the formation of all singly charged positive ions produced by electron impact on SiCl2 and SiCl from threshold to 200 eV using the fast-neutral-beam technique. Some of the cross section curves exhibit an unusual energy dependence with a pronounced low-energy maximum at an energy around 30 eV, which may be indicative of the presence of indirect ionization channels. Dissociative ionization channels are dominant for both species. The experimentally determined total single ionization cross sections for both species agree very well with calculated cross sections using the Deutsch-Märk (DM) formalism. A brief summary of the ionization cross sections determined for all four SiClx (x=1–4) species is given highlighting similarities and differences.
PACS: 34.80.Gs – Molecular excitation and ionization by electron impact / 52.20.Fs – Electron collisions
© EDP Sciences, Società Italiana di Fisica, Springer-Verlag, 2007