https://doi.org/10.1140/epjd/e2003-00244-0
Three-dimensional effects in the modelling of ICPTs
Part I: Fluid dynamics and electromagnetics
Dipartimento di Ingegneria delle Costruzioni Meccaniche, Nucleari, Aeronautiche e di Metallurgia (D.I.E.M.) and
C.I.R.A.M., Università degli Studi di Bologna, Via Saragozza 8, 40123 Bologna, Italy
Corresponding author: a colombo@ciram.ing.unibo.it
Received:
22
May
2003
Published online:
5
August
2003
In this paper, we numerically investigate the 3-D effects of different flow operating conditions and of complete or simplified treatments of the electromagnetic field on the characteristics of Ar and Ar/N2 discharges in inductively coupled plasma torches working at atmospheric pressure. Simulations are performed by means of the commercial code FLUENT suitably customized to solve the electromagnetic
field equations in the frame of an extended grid model. Steady state continuity, momentum and energy equations are solved for optically thin plasmas under the assumption of LTE and laminar flow. Results of
parameterization on the net amount of power dissipated in the discharge, frequency of the RF generator, flow
rate distribution of inlet gases and swirl velocity are presented, showing the impact of these parameters on
the fluid dynamic and electromagnetic behaviour of the plasma.
PACS: 52.75.Hn – Plasma torches / 52.65.-y – Plasma simulation / 52.80.Pi – High-frequency and RF discharges
© EDP Sciences, Società Italiana di Fisica, Springer-Verlag, 2003