https://doi.org/10.1140/epjd/e2002-00233-9
Three-dimensional modelling of inductively coupled plasma torches
Dipartimento di Ingegneria delle Costruzioni Meccaniche, Nucleari, Aeronautiche e di
Metallurgia (DIEM) and Centro Interdipartimentale di Ricerca per le Applicazioni della
Matematica (CIRAM), Università degli Studi di Bologna, Via Saragozza 8, 40123 Bologna, Italy
Corresponding author: a colombo@ciram.ing.unibo.it
Received:
5
September
2002
Published online:
13
December
2002
A three-dimensional model has been developed for simulating the behaviour of inductively
coupled plasma torches (ICPTs), using customized CFD commercial code FLUENT.
The helicoidal coil is taken into account in its actual 3-D shape, showing the effects of
its non-axisymmetry on the plasma discharge. Steady state, continuity, momentum and energy
equations are solved for argon optically thin plasmas under the assumptions of LTE and
laminar flow. The electromagnetic field is obtained by solving the 3-D vector potential
equation on a grid extending outside the torch region. In order to evaluate the importance
of various 3-D effects on calculated plasma temperature and flow fields, comparisons of our
new results with the ones obtainable from conventional 2-D models and from an improved 2-D
model that includes 3-D coil effects are presented. The presence of wall temperature hot
spots due to plasma discharge displacement from the torch axis is evidenced, while the use
of the new 3-D code for optimization of induction coil geometry and plasma gas inlet
features is foreseen.
PACS: 52.75.Hn – Plasma Torches / 52.65.-y – Plasma simulation / 52.80.Pi – High-frequency and RF discharges
© EDP Sciences, Società Italiana di Fisica, Springer-Verlag, 2003