Eur. Phys. J. D 16, 115-118 (2001)
https://doi.org/10.1007/s100530170073

Measuring the implantation depth of silver clusters in graphite

¹ Nanoscale Physics Research Laboratory, School of Physics and Astronomy, The University of Birmingham, Birmingham, B15 2TT, UK
² School of Mathematics and Physics, Loughborough University, Loughborough, Leicestershire, LE11 3TU, UK

Corresponding author: ^a D.J.Kenny@bham.ac.uk

Received: 30 November 2000
Published online: 15 September 2001

Abstract

Scanning tunnelling microscopy (STM) and molecular dynamics (MD) simulations have been used to investigate the implantation of Ag clusters into the graphite surface. An experimental measure of the implantation depth of individual clusters is gained via thermal oxidation of the bombarded graphite surfaces. This process results in etching of the cluster-induced defects to form etch pits which grow laterally whilst retaining the depth of the implanted cluster. STM imaging of the etch pits reveals the distribution of implantation depths for deposition energies of 2 keV and 5 keV. Molecular dynamics simulations for clusters of 5 keV energy show that the implantation depth for Ag is largely independent of the impact site on the graphite surface and the cluster orientation. The implantation depth found by MD lies at the upper edge of the experimental depth distribution.