Eur. Phys. J. D 16, 103-106 (2001)
https://doi.org/10.1007/s100530170070

Large-scale molecular dynamics simulations of high energy cluster impact on diamond surface

Institut für Mikrostrukturtechnik, Forschungszentrum Karlsruhe and Universität Karlsruhe, Postfach 3640, D-76021 Karlsruhe, Germany

Corresponding author: ^a yaya@photon.t.u-tokyo.ac.jp

Received: 22 November 2000
Published online: 15 September 2001

Abstract

Large-scale molecular dynamics simulations with high acceleration energy on a diamond surface were performed in order to investigate the surface erosion process. Accelerated argon or CO₂ clusters (~960 atoms, 100 keV/cluster) impacted on the (111) surface of diamond which consisted of more than 1,000,000 carbon atoms. A typical hemispherical crater appeared about 0.7 ps after the impact, and two or three-layered shockwaves were formed and propagated to certain directions, but the crater was immediately filled up with the fluidized hot carbon material due to the collective elastic recovery before the reflection of the shockwave. The impact energy of the cluster was at first transferred mainly as kinetic energy of the diamond surface in a short time, and the potential energy was activated later. The activated carbon and oxygen atoms from the impact cluster stimulated the evaporation from the diamond surface for the CO₂ cluster impact while the evaporation seemed to be suppressed by the argon atoms themselves for the argon cluster impact.