https://doi.org/10.1140/epjd/s10053-025-01106-7
Regular Article - Optical Phenomena and Photonics
A miniaturized optical column to produce an electron beam with a nano-radius used for electron lithography
Department of Physics, College of Sciences, University of Mosul, Mosul, Iraq
Received:
29
May
2025
Accepted:
30
November
2025
Published online:
21
December
2025
Electron beam lithography (EBL) is a prominent technique for fabricating nanostructures with exceptional precision, owing to its capability to manipulate electron beams at the nanoscale. This study presents the design and development of a miniaturized optical column capable of producing electron beams with diameters on the order of a few nanometers, specifically tailored for advanced lithographic applications. The system integrates an electron gun and an electrostatic Einzel lens to focus the electron beam onto material surfaces effectively. Notably, compact design achieves a size comparable to that of a human finger, facilitating its use in practical miniature devices. Through the systematic analysis, the optimal kinetic energy for electron emission was determined to be below 10−6 eV, while the focal electrode of the electrostatic lens was optimally biased at approximately 100 kV. Geometric parameters of the Einzel lens were refined, including adjusting the distance between the lens and the electron gun, to minimize the electron beam diameter and enhance focusing performance. Additionally, the impact of increasing the length of the iron shroud surrounding the final electrode was examined. Results indicate that extending the iron shroud reduces the optical column aperture, intensifying the lens’s electric field concentration. This modification shifts the beam’s focal point closer to the column but also increases the diameter of the electron beam at the focus. These findings contribute to developing compact, high-resolution EBL systems with potential for diverse nanofabrication applications.
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© The Author(s), under exclusive licence to EDP Sciences, SIF and Springer-Verlag GmbH Germany, part of Springer Nature 2025
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
