https://doi.org/10.1140/epjd/s10053-025-01076-w
Research - Plasmas
Investigation of radio-frequency sheath structure in electronegative plasma with Cairns–Tsallis electron distribution
1
EPPA, LMASI, Department of Physics, Polydisciplinary Faculty of Nador, Mohammed First University, Nador, Morocco
2
LPMR, Department of Physics, Faculty of Science, Mohammed First University, Oujda, Morocco
Received:
13
August
2025
Accepted:
30
September
2025
Published online:
18
October
2025
This study investigates the behavior of a radio-frequency (RF) plasma sheath comprising electrons, positive ions, and negative ions. The sheath structure is analyzed numerically using a one-dimensional hydrodynamic model coupled to an equivalent circuit. In this model, electrons are described by a Cairns–Tsallis distribution, which accounts for both non-extensive and non-thermal characteristics. Positive ions are modeled as a fluid, while negative ions follow a Boltzmann distribution. An equivalent circuit, consisting of a diode, a capacitor, and a current source connected in parallel, is used to describe the spatio-temporal evolution of the RF sheath properties. The results show that as the electronegativity parameter decreases, the sheath structure becomes significantly influenced by the non-extensivity parameter, the non-thermality parameter, the current amplitude, the electron to negative ion temperature ratio, and the current frequency.
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© The Author(s), under exclusive licence to EDP Sciences, SIF and Springer-Verlag GmbH Germany, part of Springer Nature 2025
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
